| Symbol | Relationship | Date | Transaction | Cost | # Shares | Value($) | Total Shares | Form 4 |
| FORM | Director | Feb 16, 2023 | Sale | $32.31 | 13,000 | 419,973 | 30,890 | Feb 17, 2023, 04:32 PM |
| ACLS | Director | Feb 13, 2023 | Sale | $127.02 | 12,000 | 1,524,240 | 10,625 | Feb 13, 2023, 04:27 PM |
| ACLS | Director | Nov 18, 2022 | Sale | $76.66 | 3,000 | 229,980 | 22,625 | Nov 18, 2022, 04:16 PM |
| VECO | Director | May 16, 2022 | Buy | $21.60 | 2,500 | 54,000 | 52,429 | May 17, 2022, 04:39 PM |
| ACLS | Director | Feb 10, 2022 | Sale | $72.81 | 3,000 | 218,430 | 22,936 | Feb 10, 2022, 04:35 PM |
| FORM | Director | Feb 08, 2022 | Sale | $41.63 | 6,000 | 249,773 | 40,098 | Feb 09, 2022, 06:49 PM |
| ACLS | Director | Aug 30, 2021 | Sale | $50.32 | 3,500 | 176,120 | 25,936 | Aug 30, 2021, 05:04 PM |
| FORM | Director | May 11, 2020 | Sale | $24.78 | 6,000 | 148,687 | 30,000 | May 12, 2020, 06:22 PM |
| ACLS | Director | May 11, 2020 | Sale | $26.61 | 6,000 | 159,660 | 19,058 | May 11, 2020, 04:27 PM |
| FORM | Director | Feb 10, 2020 | Sale | $25.94 | 10,000 | 259,379 | 36,000 | Feb 12, 2020, 01:16 PM |
| ACLS | Director | Feb 10, 2020 | Sale | $28.27 | 8,500 | 240,295 | 25,058 | Feb 10, 2020, 04:38 PM |
| FORM | Director | Nov 20, 2019 | Sale | $22.68 | 5,000 | 113,414 | 46,000 | Nov 22, 2019, 03:15 PM |
| FORM | Director | Aug 20, 2019 | Sale | $17.26 | 3,000 | 51,777 | 51,000 | Aug 21, 2019, 10:01 AM |
| FORM | Director | Feb 20, 2019 | Sale | $15.99 | 8,000 | 127,895 | 45,000 | Feb 21, 2019, 05:02 PM |
| ACLS | Director | Feb 20, 2019 | Sale | $22.43 | 5,000 | 112,150 | 27,326 | Feb 20, 2019, 06:43 PM |
| FORM | Director | Mar 06, 2018 | Option Exercise | $10.37 | 20,867 | 216,391 | 61,533 | Mar 07, 2018, 08:35 PM |
| FORM | Director | Mar 06, 2018 | Sale | $13.58 | 20,867 | 283,290 | 40,666 | Mar 07, 2018, 08:35 PM |
| FORM | Director | Jun 14, 2017 | Option Exercise | $10.37 | 400 | 4,148 | 41,066 | Jun 15, 2017, 04:53 PM |
| FORM | Director | Jun 14, 2017 | Sale | $13.93 | 400 | 5,570 | 40,666 | Jun 15, 2017, 04:53 PM |
| FORM | Director | Jun 05, 2017 | Option Exercise | $10.37 | 128,733 | 1,334,961 | 169,399 | Jun 06, 2017, 05:32 PM |
| FORM | Director | Jun 05, 2017 | Sale | $14.58 | 128,733 | 1,876,438 | 40,666 | Jun 06, 2017, 05:32 PM |
| FORM | Director | Jun 02, 2017 | Sale | $14.63 | 156,600 | 2,291,559 | 40,666 | Jun 06, 2017, 05:32 PM |
| FORM | Director | May 11, 2017 | Option Exercise | $7.52 | 13,962 | 104,994 | 198,895 | May 15, 2017, 08:29 PM |
| FORM | Director | May 11, 2017 | Sale | $13.55 | 13,962 | 189,200 | 184,933 | May 15, 2017, 08:29 PM |
| FORM | Director | May 09, 2017 | Option Exercise | $7.52 | 62,088 | 466,902 | 247,021 | May 09, 2017, 07:00 PM |
| FORM | Director | May 09, 2017 | Sale | $13.77 | 62,088 | 854,852 | 184,933 | May 09, 2017, 07:00 PM |
| VECO | Director | May 05, 2017 | Option Exercise | $33.40 | 3,592 | 119,973 | 10,597 | May 09, 2017, 06:12 PM |
| FORM | Director | Feb 24, 2017 | Option Exercise | $7.52 | 2,700 | 20,304 | 167,633 | Feb 24, 2017, 07:38 PM |
| FORM | Director | Feb 22, 2017 | Option Exercise | $7.52 | 17,597 | 132,329 | 182,530 | Feb 24, 2017, 07:38 PM |
| FORM | Director | Feb 24, 2017 | Sale | $11.23 | 2,700 | 30,308 | 164,933 | Feb 24, 2017, 07:38 PM |
| FORM | Director | Feb 22, 2017 | Sale | $11.75 | 17,597 | 206,765 | 164,933 | Feb 24, 2017, 07:38 PM |
| FORM | Director | Feb 21, 2017 | Option Exercise | $7.52 | 7,368 | 55,407 | 172,301 | Feb 21, 2017, 05:52 PM |
| FORM | Director | Feb 17, 2017 | Option Exercise | $7.52 | 84,214 | 633,289 | 249,147 | Feb 21, 2017, 05:52 PM |
| FORM | Director | Feb 16, 2017 | Option Exercise | $7.52 | 105,100 | 790,352 | 270,033 | Feb 21, 2017, 05:52 PM |
| FORM | Director | Feb 17, 2017 | Sale | $11.85 | 84,214 | 998,256 | 242,898 | Feb 21, 2017, 05:52 PM |
| FORM | Director | Feb 16, 2017 | Sale | $11.80 | 105,100 | 1,240,513 | 264,933 | Feb 21, 2017, 05:52 PM |
| FORM | Director | Feb 21, 2017 | Sale | $11.95 | 7,368 | 88,048 | 164,933 | Feb 21, 2017, 05:52 PM |
| FORM | Director | Feb 15, 2017 | Option Exercise | $7.52 | 58,170 | 437,438 | 223,103 | Feb 15, 2017, 05:53 PM |
| FORM | Director | Feb 14, 2017 | Option Exercise | $7.52 | 80,397 | 604,585 | 245,330 | Feb 15, 2017, 05:53 PM |
| FORM | Director | Feb 13, 2017 | Option Exercise | $7.52 | 18,404 | 138,398 | 183,337 | Feb 15, 2017, 05:53 PM |
| FORM | Director | Feb 14, 2017 | Sale | $12.01 | 80,397 | 965,222 | 164,933 | Feb 15, 2017, 05:53 PM |
| FORM | Director | Feb 13, 2017 | Sale | $12.15 | 18,404 | 223,649 | 164,933 | Feb 15, 2017, 05:53 PM |
| FORM | Director | Feb 15, 2017 | Sale | $12.13 | 58,170 | 705,678 | 164,933 | Feb 15, 2017, 05:53 PM |
| FORM | Director | Aug 05, 2016 | Sale | $10.51 | 23,120 | 242,896 | 164,933 | Aug 09, 2016, 12:55 PM |
| MTSN | Director | May 11, 2016 | Option Exercise | $3.80 | 33,500 | 127,300 | 7,375 | May 11, 2016, 08:00 PM |
| VECO | Director | May 06, 2016 | Option Exercise | $17.13 | 7,005 | 119,996 | 7,005 | May 06, 2016, 04:16 PM |
| FORM | EXECUTIVE CHAIRMAN | May 21, 2015 | Sale | $8.91 | 130,000 | 1,158,872 | 28,120 | May 21, 2015, 08:25 PM |
| FORM | EXECUTIVE CHAIRMAN | May 07, 2015 | Sale | $8.28 | 10,606 | 87,851 | 158,120 | May 08, 2015, 07:42 PM |
| FORM | EXECUTIVE CHAIRMAN | May 06, 2015 | Sale | $8.25 | 10,607 | 87,519 | 148,726 | May 07, 2015, 04:56 PM |
| FORM | EXECUTIVE CHAIRMAN | May 05, 2015 | Sale | $8.42 | 92,782 | 781,512 | 139,333 | May 06, 2015, 09:59 PM |
| FORM | CEO | Mar 09, 2015 | Sale | $9.11 | 27,500 | 250,407 | 52,115 | Mar 09, 2015, 07:09 PM |
| FORM | CEO | Mar 06, 2015 | Sale | $9.10 | 2,500 | 22,753 | 79,615 | Mar 09, 2015, 07:09 PM |
| FORM | CEO | Mar 05, 2015 | Sale | $9.18 | 60,000 | 550,842 | 82,115 | Mar 09, 2015, 07:09 PM |
| FORM | CEO | Mar 02, 2015 | Sale | $10.15 | 13,548 | 137,458 | 142,115 | Mar 03, 2015, 05:36 PM |
| FORM | CEO | Feb 11, 2015 | Option Exercise | $8.52 | 6,846 | 58,311 | 120,169 | Feb 12, 2015, 06:09 PM |
| FORM | CEO | Aug 08, 2014 | Buy | $6.84 | 5,000 | 34,175 | 95,348 | Aug 14, 2014, 04:03 PM |
| FORM | CEO | May 07, 2014 | Sale | $5.77 | 9,904 | 57,192 | 98,197 | May 08, 2014, 06:53 PM |
| FORM | CEO | Feb 28, 2014 | Sale | $7.11 | 13,528 | 96,154 | 75,252 | Feb 28, 2014, 09:44 PM |
| FORM | CEO | Feb 11, 2014 | Sale | $6.47 | 6,990 | 45,214 | 53,286 | Feb 12, 2014, 01:22 PM |
| FORM | CEO | Sep 16, 2013 | Sale | $7.26 | 5,689 | 41,302 | 43,609 | Sep 17, 2013, 03:12 PM |
| FORM | CEO | May 07, 2013 | Sale | $5.14 | 1,868 | 9,594 | 34,298 | May 08, 2013, 02:21 PM |
| FORM | CEO | Feb 12, 2013 | Sale | $4.61 | 7,500 | 34,564 | 31,166 | Feb 13, 2013, 03:09 PM |
| FORM | CEO | Sep 14, 2012 | Sale | $5.46 | 5,560 | 30,358 | 22,000 | Sep 17, 2012, 01:17 PM |
| FORM | CEO | May 07, 2012 | Sale | $6.09 | 1,888 | 11,500 | 12,560 | May 08, 2012, 03:29 PM |
| FORM | CEO | Sep 14, 2011 | Sale | $7.49 | 5,552 | 41,584 | 9,448 | Sep 15, 2011, 01:08 PM |
| Symbol | Relationship | Date | Transaction | Value($) |
| FORM | Director | Feb 16, 2023 | Sale | 419,973 |
| ACLS | Director | Feb 13, 2023 | Sale | 1,524,240 |
| ACLS | Director | Nov 18, 2022 | Sale | 229,980 |
| VECO | Director | May 16, 2022 | Buy | 54,000 |
| ACLS | Director | Feb 10, 2022 | Sale | 218,430 |
| FORM | Director | Feb 08, 2022 | Sale | 249,773 |
| ACLS | Director | Aug 30, 2021 | Sale | 176,120 |
| FORM | Director | May 11, 2020 | Sale | 148,687 |
| ACLS | Director | May 11, 2020 | Sale | 159,660 |
| FORM | Director | Feb 10, 2020 | Sale | 259,379 |
| ACLS | Director | Feb 10, 2020 | Sale | 240,295 |
| FORM | Director | Nov 20, 2019 | Sale | 113,414 |
| FORM | Director | Aug 20, 2019 | Sale | 51,777 |
| FORM | Director | Feb 20, 2019 | Sale | 127,895 |
| ACLS | Director | Feb 20, 2019 | Sale | 112,150 |
| FORM | Director | Mar 06, 2018 | Option Exercise | 216,391 |
| FORM | Director | Mar 06, 2018 | Sale | 283,290 |
| FORM | Director | Jun 14, 2017 | Option Exercise | 4,148 |
| FORM | Director | Jun 14, 2017 | Sale | 5,570 |
| FORM | Director | Jun 05, 2017 | Option Exercise | 1,334,961 |
| FORM | Director | Jun 05, 2017 | Sale | 1,876,438 |
| FORM | Director | Jun 02, 2017 | Sale | 2,291,559 |
| FORM | Director | May 11, 2017 | Option Exercise | 104,994 |
| FORM | Director | May 11, 2017 | Sale | 189,200 |
| FORM | Director | May 09, 2017 | Option Exercise | 466,902 |
| FORM | Director | May 09, 2017 | Sale | 854,852 |
| VECO | Director | May 05, 2017 | Option Exercise | 119,973 |
| FORM | Director | Feb 24, 2017 | Option Exercise | 20,304 |
| FORM | Director | Feb 22, 2017 | Option Exercise | 132,329 |
| FORM | Director | Feb 24, 2017 | Sale | 30,308 |
| FORM | Director | Feb 22, 2017 | Sale | 206,765 |
| FORM | Director | Feb 21, 2017 | Option Exercise | 55,407 |
| FORM | Director | Feb 17, 2017 | Option Exercise | 633,289 |
| FORM | Director | Feb 16, 2017 | Option Exercise | 790,352 |
| FORM | Director | Feb 17, 2017 | Sale | 998,256 |
| FORM | Director | Feb 16, 2017 | Sale | 1,240,513 |
| FORM | Director | Feb 21, 2017 | Sale | 88,048 |
| FORM | Director | Feb 15, 2017 | Option Exercise | 437,438 |
| FORM | Director | Feb 14, 2017 | Option Exercise | 604,585 |
| FORM | Director | Feb 13, 2017 | Option Exercise | 138,398 |
| FORM | Director | Feb 14, 2017 | Sale | 965,222 |
| FORM | Director | Feb 13, 2017 | Sale | 223,649 |
| FORM | Director | Feb 15, 2017 | Sale | 705,678 |
| FORM | Director | Aug 05, 2016 | Sale | 242,896 |
| MTSN | Director | May 11, 2016 | Option Exercise | 127,300 |
| VECO | Director | May 06, 2016 | Option Exercise | 119,996 |
| FORM | EXECUTIVE CHAIRMAN | May 21, 2015 | Sale | 1,158,872 |
| FORM | EXECUTIVE CHAIRMAN | May 07, 2015 | Sale | 87,851 |
| FORM | EXECUTIVE CHAIRMAN | May 06, 2015 | Sale | 87,519 |
| FORM | EXECUTIVE CHAIRMAN | May 05, 2015 | Sale | 781,512 |
| FORM | CEO | Mar 09, 2015 | Sale | 250,407 |
| FORM | CEO | Mar 06, 2015 | Sale | 22,753 |
| FORM | CEO | Mar 05, 2015 | Sale | 550,842 |
| FORM | CEO | Mar 02, 2015 | Sale | 137,458 |
| FORM | CEO | Feb 11, 2015 | Option Exercise | 58,311 |
| FORM | CEO | Aug 08, 2014 | Buy | 34,175 |
| FORM | CEO | May 07, 2014 | Sale | 57,192 |
| FORM | CEO | Feb 28, 2014 | Sale | 96,154 |
| FORM | CEO | Feb 11, 2014 | Sale | 45,214 |
| FORM | CEO | Sep 16, 2013 | Sale | 41,302 |
| FORM | CEO | May 07, 2013 | Sale | 9,594 |
| FORM | CEO | Feb 12, 2013 | Sale | 34,564 |
| FORM | CEO | Sep 14, 2012 | Sale | 30,358 |
| FORM | CEO | May 07, 2012 | Sale | 11,500 |
| FORM | CEO | Sep 14, 2011 | Sale | 41,584 |