| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | May 27, 2026 | Option/RSU Exercise | $98.11 | 6,848 | 671,857 | 61,809 | May 28, 2026, 11:55 AM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | May 27, 2026 | Sale | $149.23 | 6,848 | 1,021,927 | 54,961 | May 28, 2026, 11:55 AM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | May 14, 2026 | Option/RSU Exercise | $55.72 | 5,830 | 324,848 | 60,791 | May 18, 2026, 02:11 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | May 14, 2026 | Sale | $144.57 | 5,830 | 842,843 | 54,961 | May 18, 2026, 02:11 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | Apr 05, 2026 | Tax Payment (Shares) | $116.40 | 1,290 | 150,156 | 54,961 | Apr 06, 2026, 03:57 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | Feb 19, 2026 | Tax Payment (Shares) | $132.67 | 1,849 | 245,307 | 50,779 | Feb 23, 2026, 06:15 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | Jan 21, 2026 | Option/RSU Exercise | $55.72 | 5,830 | 324,848 | 43,573 | Jan 22, 2026, 03:32 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | Jan 21, 2026 | Sale | $120.00 | 5,830 | 699,600 | 37,743 | Jan 22, 2026, 03:32 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | Jul 17, 2025 | Sale | $90.00 | 3,627 | 326,430 | 37,743 | Jul 21, 2025, 02:45 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | Apr 05, 2025 | Tax Payment (Shares) | $65.39 | 476 | 31,126 | 41,113 | Apr 08, 2025, 05:22 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | Feb 20, 2025 | Tax Payment (Shares) | $107.99 | 751 | 81,100 | 34,861 | Feb 24, 2025, 07:41 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | Feb 20, 2025 | Tax Payment (Shares) | $107.99 | 330 | 35,637 | 35,612 | Feb 21, 2025, 08:24 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | Feb 10, 2025 | Option/RSU Exercise | $33.33 | 12,652 | 421,691 | 47,252 | Feb 12, 2025, 01:18 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, APS Division | Feb 10, 2025 | Sale | $106.92 | 12,652 | 1,352,752 | 34,820 | Feb 12, 2025, 01:18 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, MC Division | May 31, 2024 | Sale | $124.74 | 5,005 | 624,324 | 34,600 | Jun 04, 2024, 03:31 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, MC Division | Feb 16, 2024 | Tax Payment (Shares) | $136.81 | 1,054 | 144,198 | 38,694 | Feb 21, 2024, 04:53 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, MC Division | Feb 16, 2024 | Option/RSU Exercise | $31.10 | 12,868 | 400,195 | 51,562 | Feb 21, 2024, 04:53 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, MC Division | Feb 16, 2024 | Sale | $137.57 | 17,366 | 2,389,041 | 34,196 | Feb 21, 2024, 04:53 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, MC Division | Feb 20, 2024 | Tax Payment (Shares) | $136.81 | 874 | 119,572 | 35,673 | Feb 21, 2024, 04:53 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & President, MC Division | Feb 13, 2023 | Tax Payment (Shares) | $84.94 | 877 | 74,492 | 41,290 | Feb 15, 2023, 04:06 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Feb 18, 2022 | Tax Payment (Shares) | $130.19 | 1,429 | 186,042 | 34,402 | Feb 23, 2022, 04:11 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Feb 19, 2021 | Tax Payment (Shares) | $105.57 | 2,119 | 223,703 | 32,505 | Feb 23, 2021, 04:02 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Aug 14, 2020 | Tax Payment (Shares) | $69.73 | 289 | 20,152 | 27,704 | Aug 18, 2020, 04:16 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Feb 19, 2020 | Tax Payment (Shares) | $57.96 | 1,499 | 86,882 | 27,594 | Feb 21, 2020, 04:05 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Feb 18, 2020 | Tax Payment (Shares) | $56.40 | 920 | 51,888 | 29,093 | Feb 20, 2020, 05:08 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Nov 01, 2019 | Sale | $48.27 | 14,480 | 698,926 | 22,597 | Nov 08, 2019, 05:39 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Aug 15, 2019 | Tax Payment (Shares) | $41.36 | 289 | 11,953 | 36,437 | Aug 19, 2019, 04:07 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Feb 19, 2019 | Tax Payment (Shares) | $34.36 | 1,690 | 58,068 | 36,726 | Feb 21, 2019, 04:44 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Nov 15, 2018 | Tax Payment (Shares) | $27.39 | 596 | 16,324 | 33,702 | Nov 19, 2018, 04:02 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Aug 15, 2018 | Tax Payment (Shares) | $33.75 | 290 | 9,788 | 34,298 | Aug 17, 2018, 04:05 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Feb 19, 2018 | Tax Payment (Shares) | $33.05 | 1,509 | 49,872 | 34,031 | Feb 21, 2018, 04:39 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Nov 15, 2017 | Tax Payment (Shares) | $30.75 | 657 | 20,203 | 31,118 | Nov 17, 2017, 04:22 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Aug 15, 2017 | Tax Payment (Shares) | $24.45 | 319 | 7,800 | 31,775 | Aug 16, 2017, 05:08 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Feb 19, 2017 | Tax Payment (Shares) | $21.95 | 1,439 | 31,586 | 31,166 | Feb 22, 2017, 04:04 PM |
| ENTG | | ENTEGRIS INC | Clinton M. Haris | SVP & GM, MC Division | Nov 15, 2016 | Tax Payment (Shares) | $18.25 | 657 | 11,990 | 28,925 | Feb 16, 2017, 04:14 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Nov 08, 2013 | Tax Payment (Shares) | $9.66 | 1,879 | 18,151 | 151,374 | Nov 12, 2013, 12:40 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Nov 06, 2013 | Tax Payment (Shares) | $9.45 | 2,460 | 23,247 | 162,749 | Nov 08, 2013, 05:25 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Jul 31, 2013 | Other Acquisition or Disposition | $8.12 | 1,271 | 10,317 | 171,483 | Aug 02, 2013, 02:48 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Feb 04, 2013 | Tax Payment (Shares) | $9.26 | 3,072 | 28,447 | 171,712 | Feb 06, 2013, 05:17 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Jan 31, 2013 | Other Acquisition or Disposition | $7.79 | 1,500 | 11,692 | 173,284 | Feb 01, 2013, 04:32 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Nov 08, 2012 | Tax Payment (Shares) | $7.23 | 1,834 | 13,260 | 136,784 | Nov 13, 2012, 12:20 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Nov 06, 2012 | Tax Payment (Shares) | $7.80 | 3,285 | 25,623 | 138,618 | Nov 08, 2012, 07:10 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Jul 31, 2012 | Other Acquisition or Disposition | $7.76 | 1,500 | 11,634 | 143,447 | Aug 02, 2012, 03:47 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | May 05, 2012 | Tax Payment (Shares) | $10.68 | 18,340 | 195,871 | 141,947 | May 08, 2012, 04:14 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Mar 09, 2012 | Sale | $12.09 | 10,230 | 123,690 | 166,205 | Mar 12, 2012, 02:23 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Feb 11, 2012 | Tax Payment (Shares) | $12.04 | 427 | 5,141 | 170,517 | Feb 14, 2012, 01:08 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Feb 03, 2012 | Tax Payment (Shares) | $11.00 | 1,499 | 16,489 | 172,374 | Feb 07, 2012, 03:00 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Feb 04, 2012 | Tax Payment (Shares) | $11.07 | 1,430 | 15,830 | 170,944 | Feb 07, 2012, 03:00 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, Brooks Life Sciences | Jan 31, 2012 | Other Acquisition or Disposition | $8.16 | 1,500 | 12,246 | 173,873 | Feb 02, 2012, 02:52 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, New Markets | Jul 31, 2011 | Other Acquisition or Disposition | $8.14 | 1,500 | 12,208 | 112,373 | Aug 02, 2011, 02:35 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, New Markets | May 09, 2011 | Tax Payment (Shares) | $12.25 | 396 | 4,851 | 110,873 | May 11, 2011, 09:05 AM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, New Markets | Feb 11, 2011 | Tax Payment (Shares) | $12.52 | 419 | 5,246 | 111,269 | Feb 15, 2011, 03:33 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | SVP, New Markets | Feb 04, 2011 | Tax Payment (Shares) | $12.39 | 1,258 | 15,587 | 111,688 | Feb 08, 2011, 04:32 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | VP, Systems Solutions Group | Jan 31, 2011 | Other Acquisition or Disposition | $6.51 | 1,500 | 9,763 | 90,946 | Feb 01, 2011, 12:01 PM |
| BRKS | | BROOKS AUTOMATION INC | Clinton M. Haris | VP, Systems Solutions Group | Jul 31, 2010 | Other Acquisition or Disposition | $6.51 | 1,500 | 9,763 | 89,446 | Aug 03, 2010, 04:39 PM |